Document Type
Poster
Publication Date
Spring 4-22-2019
Abstract
In this experiment, we used the optical emission spectroscopy (OES) method to obtain the main properties of low temperature Argon plasma. The experiment was sustained in powers and pressures that ranges from 30-100 W and 15-100 mTorr. We used numerical methods for the Argon kinetic model to calculate metastable levels and resonant states for the first excited states in low temperature Argon plasma. By finding the ratio of two spectral lines and finding another ratio from a different upper energy level that goes down to the same two lower energy levels, we can construct a system of two nonlinear equations. The solution to the equations will give us the population densities for the metastable levels. The metastable levels are energy carriers and they play a very important role in plasma etching and characterization of plasma etching.
Recommended Citation
Khogeer, Nada; Gonzalez, Chelsy; and Nikolic, Milka, "The Population Densities of Argon Metastable Levels" (2019). Physics and Astronomy. 73.
https://repository.usfca.edu/phys/73
Included in
Atomic, Molecular and Optical Physics Commons, Optics Commons, Other Physics Commons, Plasma and Beam Physics Commons
