Document Type


Publication Date

Spring 4-22-2019


In this experiment, we used the optical emission spectroscopy (OES) method to obtain the main properties of low temperature Argon plasma. The experiment was sustained in powers and pressures that ranges from 30-100 W and 15-100 mTorr. We used numerical methods for the Argon kinetic model to calculate metastable levels and resonant states for the first excited states in low temperature Argon plasma. By finding the ratio of two spectral lines and finding another ratio from a different upper energy level that goes down to the same two lower energy levels, we can construct a system of two nonlinear equations. The solution to the equations will give us the population densities for the metastable levels. The metastable levels are energy carriers and they play a very important role in plasma etching and characterization of plasma etching.